amcFluoroFlow--American Membrane Corporation

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amcFluoroFlow

amcFluoroFlow cartridge is an advanced all-fluoropolymer cartridge designed for critical chemical filtration applications. amcFluoroFlow cartridge delivers ultimate protection from films, gels, and hard contamination by provide capacity removal of contaminants from electronics processing chemistries.

amcFluoroFlow cartridge is made from just two components, unsupported polytetrafluoroethylene membrane and perfluoroalkoxy structural materials. These materials are clean and offer the highest resistance to the strong photoresist stripping chemicals at elevated temperatures.

Each amcFluoroFlow cartridge is high purity, acid washed, 18 Mega-ohm DI water flushed, assuring quick and reliable startup. Optional water-wet cartridge requires no IPA procedures, eliminating the time, cost, inconvenience and hazardous waste disposal associated with conventional IPA prewetting.

Performance Advantages

All fluoropolymer construction resists most stringent chemical conditions at elevated temperatures
Offers superior retention of gels/particles due to the use of precisely controlled pore structure of polytetrafluoroethylene membrane
Acid washing and DI water flushing procedures on cartridge provides low extractables
The membrane and the structural components of cartridge are fusion-welded, eliminating unnecessary materials of construction and removing what historically has been a source of continual organic contamination
100% integrity tested

Typical Applications

Organic stripper in non-ashing polymer stripping process
Fine chemical manufacture and distribution: acids, etchants, solvents, photoresists
Point-of-use chemical filtration

Materials of Construction
Filter Media:	Pleated single layer of unsupported hydrophobic polytetrafluoroethylene
Support Material:	PFA
Structure Components:	PFA
Sealing Technology:	Thermal bonding

Nominal Length
amcFluoroFlow 69:	10, 20, 30, and 40 inch (25.4, 50.8, 76.2, and 101.6 cm)
amcFluoroFlow 83:	10 inch (26.0 cm)

Diameter
amcFluoroFlow 69:	69 mm
amcFluoroFlow 83:	83 mm

Nominal Pore Size	0.05, 0.1, 0.2, 0.45, 1, 5 µm

Typical Effective Filtration Area:
amcFluoroFlow 69:	1.1 m²/10 inch
amcFluoroFlow 83:	1.7 m²/10 inch

Maximum Operating Temperature	150°C at 7 psi (0.5 bar)

Maximum Differential Pressure	75 psi (5.1 bar) at ambient temperature

Resistivity Recovery within 18 Mega-ohm	≤120 L/10 inch length (at 1 L/min flow rate)

Meltallic Extractables	<50 ppb (<5 ppb optional)

Cleanliness	<5 particles/100 mL (>0.5 µm particle after 30 minutes 18 mΩ water flush at 5 L/min flow rate)

Typical Water Flow Rate

Ordering Information amcFluoroFlow 69: F F 6 ■ ■ F ◆ ● ▲ F F 6 ■ ■ F ◆ ● ▲ P W (Prewetting) amcFluoroFlow 83: F F 8 ■ ■ F ◆ ● ▲ F F 8 ■ ■ F ◆ ● ▲ P W (Prewetting)
■ Rated Pore Size	50	0.05 μm
	10	0.1 μm
	20	0.2 μm
	45	0.45 μm
	01	1 μm
	05	5 μm

◆ Nominal Length	1	10 inch (25.4 cm)
	2	20 inch (50.8 cm)
	3	30 inch (76.2 cm)
	4	40 inch (101.6 cm)

● Cartridge Configuration	D	SOE, Flat
	F	DOE, Gasket/Gasket 10 inch increments
	M	SOE, -222/Flat
	V	SOE, -226/Flat

▲ Seal Material	S	Silicone
	V	Viton
	E	Ethylene Propylene
	F	FEP Encapsulated

amcFluoroFlow.pdf